http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002523869-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2826 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24485 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24585 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-252 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-26 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-153 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-252 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-02 |
| filingDate | 1999-08-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-07-30^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002523869-A |
| titleOfInvention | Automatic setting of energy filtering transmission electron microscope |
| abstract | (57) Abstract: Electron optical aberrations of an energy filtering system (120) of an energy filtering transmission electron microscope (100) (EFTEM) are automatically corrected under computer control, and the EFTEM is used for use. Set. The beam is scanned at the entrance to the filter in a pattern corresponding to the defined geometry using the optics of the electron microscope in front of the energy filter. Either focus the beam finely to create spots at each location that passes during the pattern scan, or diverge the beam with a well-defined intensity distribution, as usually caused by the beam passing through the sample. By imprinting, the relative scanned displacement can be considered using a cross-correlation technique. For a highly focused beam, the electronic image of the scanned pattern directly produces a spot pattern image. Deviations of the recorded spot pattern image from the defined scan geometry reflect image aberrations caused by the energy filter. In the case of a diverging beam, the filtered electronic image of the scanning beam is cross-correlated with the image of the beam acquired without scanning, giving the actual displacement of each scanning beam position due to filter aberration / distortion. Generate a peak image. Summing the cross-correlation peak images produces a spot pattern image equivalent to that obtained for the focused beam. The deviation of the recorded spot pattern image from the defined scan geometry is analyzed, the aberrations caused by the energy filter are evaluated and then corrected. |
| priorityDate | 1998-08-24^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415722097 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID36603 |
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