http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002536798-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2000-01-28^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-10-29^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002536798-A |
| titleOfInvention | Atmospheric pressure steady glow discharge plasma |
| abstract | (57) [Summary] The plasma processing apparatus (10) incorporates a porous metal layer (34) into one of the electrodes (30). The porous layer is selected to have pores with an average diameter within one order of the magnitude of the mean free path of the plasma gas at atmospheric pressure. Plasma gas is injected into the electrode at substantially atmospheric pressure and diffused by the porous layer, thereby producing a uniform glow discharge plasma. The film material to be treated (14) is exposed to the created plasma between this electrode and a second electrode (12) coated with a dielectric layer (16). Because of the micro size of the pores of the porous metal (34), each pore also produces a hollow cathode effect that promotes ionization of the plasma gas. As a result, a steady glow discharge plasma is generated at atmospheric pressure and at a low power frequency of 60 Hz. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015533626-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012140171-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006019067-A |
| priorityDate | 1999-02-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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