http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003206288-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F1-08 |
| filingDate | 2002-01-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670fbf340840ebaff8a02449b58cdbcb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7c4e4231d125f3446eef4963f6209a0 |
| publicationDate | 2003-07-22^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003206288-A |
| titleOfInvention | Solution raw material for metalorganic chemical vapor deposition containing copper complex, copper (II) β-diketonate complex, and copper thin film produced using the same |
| abstract | (57) [Summary] [Problem] It has excellent thermal stability, is hardly decomposed in a stored state, and has a long life. The MOCVD apparatus is hardly corroded and does not complicate exhaust gas treatment in the MOCVD process. Excellent adhesion to the underlayer. SOLUTION: First and second ligands are formed by coordinating to copper atoms, respectively, the first and second ligands have the same basic skeleton, and each of the ligands is A copper complex having one or more atomic groups branched from a basic skeleton and having a structure in which an atomic group of a first ligand and an atomic group of a second ligand are different from each other. Β of copper (II) represented by the following formula (1) It is a solution raw material for organometallic chemical vapor deposition in which a diketonate complex is dissolved in an organic solvent. Embedded image Here, R 1 is an isopropyl group, and R 2 is an ethyl group. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005121400-A1 |
| priorityDate | 2002-01-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Showing number of triples: 1 to 122 of 122.