http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003277310-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3593a13cc4ab7079f7a69ef885b5a005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C45-77 |
| filingDate | 2003-04-07^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30466d5bd65bef24e0f494ea06033bdb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85dc1ac7c25c760deb438ff04132b8ae |
| publicationDate | 2003-10-02^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003277310-A |
| titleOfInvention | Preparation of high purity β-diketonate complex of alkaline earth metal and high purity β-diketonate complex for thin film formation by chemical vapor deposition |
| abstract | PROBLEM TO BE SOLVED: To produce a highly pure alkaline earth metal β-diketonate complex useful as a raw material for forming a thin layer by a CVD method. SOLUTION: An acetone solution of DPM and an acetone solution of BaCl 2 are mixed, and while stirring well, a methyl alcohol solution of NaOH is added dropwise to cause a reaction between DPM and Ba. As shown in FIG. 1 (C), when the amount of impurity evaporation measured by thermogravimetric analysis under vacuum is less than 0.01%, the amount of chelate evaporation is 99.5% or more, carbon measured by elemental analysis Content is 99.1-10 of theoretical amount 1.0%, hydrogen content is 99.0 to 101.0 of the theoretical amount %, A high-purity Ba (DP) having a metal content of 99.0 to 101.0% of the theoretical amount as measured by ICP analysis. M) Obtain 2 . |
| priorityDate | 2003-04-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Showing number of triples: 1 to 32 of 32.