http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004361271-A

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filingDate 2003-06-05^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2004-12-24^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2004361271-A
titleOfInvention Thermal air flow meter
abstract An object of the present invention is to provide a thermal tail air flow meter capable of improving sensitivity of air flow measurement, reducing power consumption of a heating element, and expanding a measurement range. A heating resistor is formed on an insulating film in a heat insulating region of a rectangular space formed on a flat substrate (silicon substrate), and a heating resistor is formed on an upstream side and a downstream side of the heating resistor. To form two resistance thermometers. The length of a side parallel to the axial direction of the airflow is large in the heat insulating region 2 of the rectangular space. [Selection diagram] Fig. 1
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