abstract |
An object of the present invention is to provide a thermal tail air flow meter capable of improving sensitivity of air flow measurement, reducing power consumption of a heating element, and expanding a measurement range. A heating resistor is formed on an insulating film in a heat insulating region of a rectangular space formed on a flat substrate (silicon substrate), and a heating resistor is formed on an upstream side and a downstream side of the heating resistor. To form two resistance thermometers. The length of a side parallel to the axial direction of the airflow is large in the heat insulating region 2 of the rectangular space. [Selection diagram] Fig. 1 |