http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005169302-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-86 |
| filingDate | 2003-12-12^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d933c1125fcd9a4ca203c4abb136edf |
| publicationDate | 2005-06-30^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005169302-A |
| titleOfInvention | Cleaning method and cleaning device |
| abstract | PROBLEM TO BE SOLVED: To remove dust adhered to an object to be cleaned, such as a magnetic transfer master, firmly attached by an anchor effect at a high removal rate. SOLUTION: A first cleaning mechanism 3 that performs a first cleaning step of spraying dry ice particles on an object W held on a stage 2 and an adhesive member 5 is pressed against the object W after the first cleaning. A second cleaning mechanism 4 that performs a second cleaning process to be peeled off is provided, and the adhesive force of adhering dust is weakened by dry eye screening, and the adhesive member 5 removes the adhesive. Preferably, at least one of the first and second cleaning steps is performed a plurality of times to increase the removal rate. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8300336-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009043388-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7877835-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008012387-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015109349-A |
| priorityDate | 2003-12-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID280 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457698762 |
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