http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005212055-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D11-00
filingDate 2004-01-30^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5739a61209d6d1a4afcf555f604fe2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4aea28c7cad35b9d0ae8ce410ef0c651
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publicationDate 2005-08-11^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2005212055-A
titleOfInvention Nonwoven fabric-based abrasive cloth and method for producing the same
abstract Provided is a polishing pad capable of preventing surface sag and sag of an object to be polished or fine unevenness due to a hard resin in polishing processing and obtaining satisfactory flatness and polishing ability. SOLUTION: One type of thermoplastic polyurethane is wet impregnated and solidified on a nonwoven fabric, foaming of the polyurethane is treated with a solvent, and further cured with a curing agent. [Selection figure] None
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