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publicationDate 2005-12-22^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2005350423-A
titleOfInvention Thin film forming raw material and thin film manufacturing method
abstract PROBLEM TO BE SOLVED: To provide a thin film forming raw material containing a zinc compound suitable for forming a thin film containing zinc. A thin film forming raw material containing a bis (β-diketonato) zinc compound that is liquid at 25 ° C. [Selection figure] None
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