Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ad78b36d08c20f06075145cc1caf3ac8 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C49-92 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
filingDate |
2004-06-14^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85e6923b7472d4098578ff972ac4e1a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2984055293faa13905963cd7996aab7 |
publicationDate |
2005-12-22^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2005350423-A |
titleOfInvention |
Thin film forming raw material and thin film manufacturing method |
abstract |
PROBLEM TO BE SOLVED: To provide a thin film forming raw material containing a zinc compound suitable for forming a thin film containing zinc. A thin film forming raw material containing a bis (β-diketonato) zinc compound that is liquid at 25 ° C. [Selection figure] None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008050623-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008088511-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012511056-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018123095-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021200219-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7015112-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101400611-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220161372-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11453786-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008041444-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008229412-A |
priorityDate |
2004-06-14^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |