| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-423 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2872
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2863
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2884
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-275
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2002-08-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2005-01-06^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005500691-A |
| titleOfInvention |
Providing optical control of semiconductor devices carried on a wafer |
| abstract |
Disclosed is a method for controlling light flow of a wafer relative to a semiconductor wafer (1700) having a substrate (1720), at least one active layer (1765), and at least one surface layer (1710). Control of the light flow is achieved by forming trenches (1725) and / or insulating implants (1730) in the wafer (1700) so that trenches (1725) acting as non-conductive areas (1750) are active regions (1760). ) Can be realized. Also disclosed are methods and systems for WLBI (wafer level burn-in) of semiconductor devices. Control of light flow at the wafer level is important when using the method and system for WLBI. |
| priorityDate |
2001-08-13^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |