| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2004-09-16^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6515258e38c6ea297c23c837e2d47e40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7faca1ebcde5264598d60074c34543fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3725f05672da4c101bd418ffd3698198 |
| publicationDate |
2006-03-30^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006084799-A |
| titleOfInvention |
Antireflection film forming composition and wiring forming method using the same |
| abstract |
PROBLEM TO BE SOLVED: To provide an antireflection film forming material capable of increasing a difference in etching rate between a resist pattern and an antireflection film. (A) A composition for forming an antireflection film comprising a siloxane polymer containing a light absorbing compound group. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006312717-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102405499-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8178284-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008246876-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010262230-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101501571-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180077063-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016167092-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7923524-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008266576-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010237667-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008089711-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006107029-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008089710-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015156514-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007114253-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008041468-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008038602-A1 |
| priorityDate |
2004-09-16^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |