| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D171-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L71-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-19 |
| filingDate |
2004-10-22^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d71db86958ca8dbf1703c45da05396c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c37094be8b82f5989fb61137e683337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3725f05672da4c101bd418ffd3698198 |
| publicationDate |
2006-05-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006120920-A |
| titleOfInvention |
Silica-based coating solution |
| abstract |
PROBLEM TO BE SOLVED: To provide a coating solution for forming a silica-based coating film capable of forming a silica-based coating film having a low dielectric constant and hardly causing a film decrease or a dielectric constant increase by a stripping solution. (A1) a reaction product obtained by hydrolyzing an alkyltrialkoxysilane, (A2) a reaction product obtained by hydrolyzing a trialkoxysilane, and (B) a polyalkylene glycol and its A coating liquid for forming a silica-based film, comprising at least one selected from the group consisting of terminal alkylated products. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015156514-A |
| priorityDate |
2004-10-22^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |