http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006183069-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate | 2004-12-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93ed2eeb012072bb31135b0e2d772f60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6518a1411979ac9d55b14c96234595c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_066eb237f6ada51a7bbaf0d39f805d78 |
| publicationDate | 2006-07-13^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006183069-A |
| titleOfInvention | Method for producing metal oxide film |
| abstract | [PROBLEMS] An object of the present invention is to solve the above-mentioned problems in a method for producing a metal oxide film on a film formation object by chemical vapor deposition using a metal complex gas and water vapor, and to achieve an excellent composition. A method for producing a metal oxide film having film properties is provided. The object of the present invention is to provide a method for producing a metal oxide film on an object to be deposited by chemical vapor deposition using a metal complex gas and water vapor, in which a silyl ether group is used as the metal complex. This is solved by a method for producing a metal oxide film, which comprises using a metal complex having β-diketonato as a ligand. [Selection] Figure 1 |
| priorityDate | 2004-12-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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