http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006203008-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ee12a05c7bf51327bc4b4f54e10bc88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1e0fc105cdaa6fc6208bcc48eadab50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-23 |
| filingDate | 2005-01-21^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb7ea23bc3f3c9c7d7348722f70dda08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0dd7f599458992b3820fbc281788ca3b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f185d8eda963da67563a690fd7e9dc7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c58f169b81e904a7a710a1612284320 |
| publicationDate | 2006-08-03^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006203008-A |
| titleOfInvention | Two stage laser system |
| abstract | PROBLEM TO BE SOLVED: To provide a MOPO type two-stage laser system suitable for a semiconductor exposure apparatus with low spatial coherence and high energy stability. SOLUTION: An oscillation stage laser and an amplification stage laser 300 that inputs laser light oscillated by the oscillation stage laser as seed light, amplifies the seed light, and outputs the seed light. Both of them are provided with a chamber 30 filled with a laser gas, and an amplification stage laser 30 is arranged in a Fabry-Perot etalon type stable resonator and a pair of discharge excitation pumps disposed in parallel and facing each other in the laser chamber. In the two-stage laser system including the discharge electrodes 30a and 30b, at least one of the rear mirror 36 and the front mirror 37 constituting the Fabry-Perot etalon type stable resonator of the amplification stage laser 300 is at least in the discharge direction or the discharge direction. It has a positive refractive power in one of the orthogonal directions. [Selection] Figure 6 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010010551-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009277977-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008192957-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE45957-E http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012522376-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013070029-A |
| priorityDate | 2005-01-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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