http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006211589-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2b4560b8ce75fb9ce01a2be76af24f29 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-319 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 |
| filingDate | 2005-01-31^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c22cd1a91f6e1d31c4d0b53a3dbd251 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a30e02e13e893e972e4bce0b2846769e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbf0fa25219b3d532a8c094c7fa40110 |
| publicationDate | 2006-08-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006211589-A |
| titleOfInvention | Piezoelectric thin film device and manufacturing method thereof |
| abstract | Piezoelectric thin film resonators are greatly affected by the characteristics of the resonators due to the crystallinity of a piezoelectric layer. In order to form a good piezoelectric layer, the lower electrode layer serves as an underlayer for the piezoelectric layer, so that a good electrode layer (particularly the lower electrode layer) is required. Therefore, an electrode layer having excellent crystallinity and a method for producing the electrode layer are required. In a piezoelectric thin film device, a piezoelectric thin film device formed by an electrode layer heated for a predetermined time at a temperature higher than the temperature at which the electrode layer is formed after the lower electrode layer is formed, and a method for manufacturing the piezoelectric thin film device. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100802109-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020203092-A1 |
| priorityDate | 2005-01-31^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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