http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006229137-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ee12a05c7bf51327bc4b4f54e10bc88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1e0fc105cdaa6fc6208bcc48eadab50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2005-02-21^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e57a246ae4f205a4bff7c83b5f385a17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0615b210ae62a833e955c901db7cb6a |
| publicationDate | 2006-08-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006229137-A |
| titleOfInvention | Pulse oscillation type discharge excitation laser equipment |
| abstract | A laser gas having a desired interelectrode flow rate can be stably guided into a discharge space, and the influence of acoustic waves generated by a main discharge, particularly the influence of acoustic wave components in the discharge direction, can be reduced, and a laser having a spectral line width or the like A gas laser device capable of improving the frequency characteristics of performance is provided. A pulse that pulsates with a maximum oscillation frequency of 4 kHz or more by applying a high voltage between a main electrode composed of a pair of anode and cathode electrodes arranged opposite to each other to perform a pulsed main discharge. In the oscillating discharge excitation laser device, at least one of the anode electrode and the cathode electrode is provided without a gap between the discharge surface, or a gap is formed between the discharge surface in the discharge space. It is equipped with a sound-absorbing material provided by opening. [Selection] FIG. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9722385-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107851951-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107851951-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015125631-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015125286-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017022105-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015125631-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10965085-B2 |
| priorityDate | 2005-02-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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