| abstract |
A probe calibration apparatus for accurately measuring the temperature of a substrate in a substrate processing chamber. A probe according to the present invention includes a light guide having one end inserted into a processing chamber. The other end of the light guide is coupled to a bifurcated optical fiber 46. The light source 54 is optically coupled to one branch of the optical fiber, and the pyrometer 56 is optically coupled to the other branch. To self-calibrate the probe, a stable reflectivity object 80, such as a gold-plated wafer, is inserted into the chamber, the light source is activated, and the intensity of the light reflected from the object is measured by a pyrometer. [Selection] Figure 2 |