http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006243559-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00 |
| filingDate | 2005-03-04^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e4a1bdb98fe8c4d168626d6e6299ce5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6dc2f136bdb247a13c226ff4273b88f |
| publicationDate | 2006-09-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006243559-A |
| titleOfInvention | Pattern forming material, pattern forming apparatus and pattern forming method |
| abstract | PROBLEM TO BE SOLVED: To provide a pattern forming material that is excellent in handleability such as visibility at the time of surface inspection of a photosensitive layer and has excellent surface shape and sensitivity of the photosensitive layer, and a pattern forming method using the pattern forming material Provided. SOLUTION: At least a support and a photosensitive layer on the support, the photosensitive layer containing a binder, a polymerizable compound, a photopolymerization initiator, and a coloring dye, and the coloring dye 0.5 The pattern forming material is characterized by being a colored dye having a filtration pressure with a 0.45 μm filter having a pore size of a methyl ethyl ketone solution of mass% of 0.3 MPa or less. The dye is preferably an ionic dye, and the counter anion of the ionic dye is preferably naphthalene sulfonic acid, and particularly preferably Victoria Pure Blue NAPS. It is a pattern formation method characterized by including at least exposing to this photosensitive layer. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010282050-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110446975-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018182135-A1 |
| priorityDate | 2005-03-04^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Showing number of triples: 1 to 931 of 931.