| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-135 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-611
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-1258
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B44C5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B43K23-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B43K8-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1343 |
| filingDate |
2005-07-29^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_599631ad2f14dcd02f2772d66063f1fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5d6433f35e4dfaeb1fb6ed1f85754ba |
| publicationDate |
2006-09-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006245525-A |
| titleOfInvention |
Film pattern forming method, device and manufacturing method thereof, electro-optical device, and electronic apparatus |
| abstract |
PROBLEM TO BE SOLVED: To provide a method for forming a thin film pattern capable of accurately and stably forming a film pattern which is miniaturized or thinned. SOLUTION: A step of forming a bank B on a substrate P, a step of disposing a functional liquid L in a region partitioned by the bank B, and drying the functional liquid L disposed on the substrate P to form a film pattern F Forming the step. The bank B is formed by forming a thin film B0 made of a bank forming material on the substrate P, subjecting the surface to a liquid repellent treatment, and then patterning. As a result, only the upper surface of the bank B is made liquid-repellent and the side surface of the bank B is not made liquid-repellent (a state having good wettability with respect to the functional liquid L). Can spread between banks. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020065859-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7767504-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4556838-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006344922-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10494483-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9857682-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008210967-A |
| priorityDate |
2005-02-04^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |