| abstract |
[PROBLEMS] To provide a quartz glass tube capable of manufacturing a lamp having high dimensional accuracy and capable of being mounted on a conventional excimer UV lamp apparatus without significant modification, and capable of uniform irradiation over a wide area, and its manufacture. Provide a method. A modified synthetic quartz glass tube for an excimer UV lamp is made of synthetic silica glass synthesized from a high purity silicon compound by a flame hydrolysis method, and emits vacuum ultraviolet light having a wavelength of 150 to 250 nm. In the deformed synthetic quartz glass tube for UV lamp, the dimension of the deformed synthetic quartz glass tube is 1000 mm or more in length, and the outer surface of the tube is provided with one or more flat portions having a uniform width in the longitudinal direction. The width and width of the part is 5mm to 350mm, the wall thickness is 0.7mm to 8mm, the surface has no scratch of 0.8mm or more, or the length is 200mm or more. Is 0.5 mm or less and 25% or less, the variation rate of the width of the plane part is 5% or less, the warp of the plane part is 0.1% or less, and the twist is 0.5 or less. [Selection] Figure 1 |