http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006349939-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2005-06-15^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29407907a39a844a28ecb90f4f3aa9f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b371d878503af0da2b50566aef90ca7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46d48413287a33a6939376223b92eb81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2a6564d37d593cb43a9d727ba2ef3bf |
| publicationDate | 2006-12-28^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006349939-A |
| titleOfInvention | Positive resist composition and resist pattern forming method |
| abstract | PROBLEM TO BE SOLVED: To provide a positive resist composition and a resist pattern forming method that have good solubility in a resist solvent and can suppress variation in pattern size when the exposure dose is changed. A positive resist composition comprising (A) a resin component whose alkali solubility is increased by the action of an acid, and (B) an acid generator component which generates an acid upon irradiation with radiation. And a structural unit derived from a mono (α-lower alkyl) acrylic acid ester containing a core part containing an acid dissociable, dissolution inhibiting group and a carboxy group and / or a hydroxyl group bonded to the core part ( A positive resist composition, which is a star polymer having an arm portion containing a0). [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007155851-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010250278-A |
| priorityDate | 2005-06-15^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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