http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007334155-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368
filingDate 2006-06-16^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad9bf50d1f42b1c0c557fa66a8b50d1d
publicationDate 2007-12-27^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2007334155-A
titleOfInvention Pattern forming method, thin film transistor array substrate, and liquid crystal display element
abstract A pattern forming method, a TFT array substrate, and a liquid crystal display element suitable for manufacturing a liquid crystal display (LCD) and a plasma display (PDP) for a large screen are provided. An exposure head arranged such that the column direction of the picture element portions forms a predetermined set inclination angle θ with respect to the scanning direction, and the usable picture element parts are specified by the use picture element specifying means. Among them, the pixel part to be used for N double exposure (where N is a natural number of 2 or more) is specified, and only the pixel part specified by the used pixel part specifying unit is specified by the pixel part control unit. It is a pattern forming method including an exposure process in which exposure is performed by controlling the picture element so as to be involved in exposure and moving the exposure head relative to the positive photosensitive layer in the scanning direction. [Selection figure] None
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015064556-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015064556-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015064555-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013140336-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015064555-A1
priorityDate 2006-06-16^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410483175
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID602279
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http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474343
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http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7771
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