| abstract |
The present invention relates to an electrostatic drive device, a movable electrode (10) at least partially movable with respect to a substrate (22); and disposed on the same side as the movable electrode and fixed to the substrate. And at least two fixed electrodes (12, 14). Each fixed electrode is disposed to face a part of the movable electrode. The electrostatic drive device according to the invention further comprises at least one pivot (18) for at least a part of the movable electrode. |