| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee635a970127f4d7cc165b4e66d4cd2f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F28D15-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 |
| filingDate |
2007-03-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b13dbfa594e6250a4328cd748b7d6479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70050a4d8e3139b1984d8097ac08bf0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a25ca776b8f9da2bd96ff3afe491a7a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd7bc47490adab8c86913724f08c07a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cc49b3eccc0882b743babebdf3bd0a2 |
| publicationDate |
2008-02-28^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008043938-A |
| titleOfInvention |
Cleaning device |
| abstract |
There is provided a cleaning apparatus capable of eliminating light dust and particles floating on a liquid surface and preventing reattachment of dust and the like when a workpiece after solvent cleaning in a cleaning tank is lifted. A cleaning tank 12 includes a liquid cleaning area 16 for cleaning a workpiece 44 with a stored liquid of a cleaning agent 46, and an overflow tank 38 (liquid) in which excess liquid of the cleaning agent 46 in the liquid cleaning area 16 flows. Outflow area) and a first circulation path 71 that is discharged from one of the surfaces in the cleaning tank 12 and then introduced into the liquid cleaning area 16. The liquid cleaning area 16 passes through the first circulation path 71. An inflow member 72 that allows the cleaning agent 46 to flow into the liquid cleaning area 16, and a liquid flow of the cleaning agent 46 that flows from the inflow member 72 into a liquid flow 74 parallel to the liquid surface 73 of the cleaning agent 46 in the liquid cleaning area 16. A liquid level flow means having a liquid flow guide 81 that leads to the liquid level 73 is provided. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9728313-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011529395-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013110403-A3 |
| priorityDate |
2006-07-20^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |