http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008163149-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dae64c775f32c43199adbb4389c2c9b3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F6-08 |
| filingDate | 2006-12-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcd7252d848cd52194750192bc6f8aed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e24b20e201bd24933be441916925993f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b89bf1120eb07019f66a388438f3d055 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9496635f9ee299c708a05850c1ce12fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99a5425eaa98729c97e57e2cef405f84 |
| publicationDate | 2008-07-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008163149-A |
| titleOfInvention | Method for synthesizing hyperbranched polymer, hyperbranched polymer, resist composition, semiconductor integrated circuit, and method for manufacturing semiconductor integrated circuit |
| abstract | An object of the present invention is to synthesize a hyperbranched polymer stably and in large quantities while reducing the amount of waste liquid discharged during synthesis. When a hyperbranched polymer is synthesized through living radical polymerization of a monomer in the presence of a metal catalyst, the metal catalyst is removed from the reaction system in which the polymer after the living radical polymerization exists after the living radical polymerization. And a trace metal removal step of removing a trace amount of metal mixed in the hyperbranched polymer using an adsorbent having a property of adhering metal. [Selection figure] None |
| priorityDate | 2006-12-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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