| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-269
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-215
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2365-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L101-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-14 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K7-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-14 |
| filingDate |
2005-12-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2008-07-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008524351-A |
| titleOfInvention |
Plastic material |
| abstract |
The present invention relates to plastic materials used to manufacture components that are subject to frictional stress, particularly retaining rings used to hold semiconductor wafers in chemical mechanical polishing equipment. The invention also relates to a retaining ring with a significantly longer service life produced therefrom and a method for its production. It is proposed that the plastic material comprises a plastic matrix and granular TiC embedded in it. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019034392-A |
| priorityDate |
2004-12-20^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |