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publicationDate 2009-07-16^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2009158946-A
titleOfInvention THIN FILM TRANSISTOR, DISPLAY DEVICE HAVING THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME
abstract A thin film transistor with excellent electrical characteristics, a display device including the thin film transistor, and a method for manufacturing them with high yield are proposed. A gate electrode, a gate insulating film, a crystal grain mainly containing silicon formed on a surface of the gate insulating film, a semiconductor film mainly containing germanium covering the gate insulating film and the crystal grain, A thin film transistor in which a buffer layer in contact with a semiconductor film containing germanium as a main component overlaps with the thin film transistor and a display device including the thin film transistor. [Selection] Figure 1
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011119451-A
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