| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-502
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-2045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2251-102
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-2047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-2073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-706
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-20 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8668
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B17-0025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27D17-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F27D17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2008-08-09^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29d86490305cf48157d6d4c81a0de428
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c39efb3242913a78207bef724724674
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec213ca362218f33857a4150781205cd |
| publicationDate |
2010-02-25^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2010042330-A |
| titleOfInvention |
Metal recovery method, metal recovery apparatus, exhaust system, and film forming apparatus using the same |
| abstract |
[PROBLEMS] To recover a metal component from exhaust gas discharged from a processing vessel that forms a thin film on the surface of an object to be processed and to remove exhaust gas while having a simple structure with a small space. The object is to provide a metal recovery device. SOLUTION: A metal component is recovered from exhaust gas discharged from a processing vessel in which a thin film is formed on the surface of an object to be processed using a raw material gas made of an organic metal compound, and the exhaust gas is removed. In the metal recovery device 66, the trapping member 84 has a collection member 84 that exposes the exhaust gas to a high temperature and thermally decomposes the unreacted source gas contained in the exhaust gas to attach the metal component contained in the source gas. And a detoxification unit 82 having a catalyst 100 that oxidizes and detoxifies detrimental gas components contained in the exhaust gas that has passed through the collection unit. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020128565-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140029412-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013062362-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11613809-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020162499-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11566326-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017170326-A |
| priorityDate |
2008-08-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |