http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010061936-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-153 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-18 |
| filingDate | 2008-09-03^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56abe055eb196d466c8a4b1f874e0376 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffb93d54f81b19adcfe20f3a310ee169 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4df921f93d6566129e8c9dd59fa7da61 |
| publicationDate | 2010-03-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010061936-A |
| titleOfInvention | Orbit corrector for charged particle beam and method of manufacturing orbit corrector for charged particle beam |
| abstract | 【Task】 To solve the problems of the conventional aberration correction system in a rotationally symmetric system, and to provide a manufacturing method of a low-cost and small-sized charged particle beam trajectory corrector. [Solution] In a trajectory corrector for a charged particle beam installed in a path of a charged particle beam generated from a charged particle beam source, a plurality of electrodes that are conductors and control the charged particle beam with current, and a plurality of insulators , And are alternately joined by diffusion joining, and the inside is configured as an electron beam path. [Selection] Figure 2 |
| priorityDate | 2008-09-03^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Showing number of triples: 1 to 18 of 18.