http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010089170-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_757db2d93afe6d8200b559d9cdb0d06d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C2206-40 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C33-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D7-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-025 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D7-00 |
| filingDate | 2008-10-03^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffab6f951b5c4d80dfa31548b9426ac2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fbb5fc503a6a94410d9c593c9d95cb9 |
| publicationDate | 2010-04-22^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010089170-A |
| titleOfInvention | Spherical body polishing apparatus, spherical body polishing method, and spherical member manufacturing method |
| abstract | A spherical body polishing apparatus, a spherical body polishing method, and a spherical member manufacturing method capable of reducing the polishing cost are provided. A polishing apparatus includes a turntable 10 having a turntable polishing surface 10A and a fixed plate having a fixed plate polishing surface facing the turntable polishing surface 10A. The turntable polishing surface 10A is capable of relative rotation while maintaining a state facing the fixed plate polishing surface. Grooves 11 extending in the circumferential direction along the rotation are formed on the turntable polishing surface 10A. The turntable 10 in which the groove 11 is formed is formed on the abrasive layer 18 including abrasive grains made of diamond particles having hardness higher than that of the spherical sphere, and the abrasive layer 18. And a holding layer 19 having a lower hardness. The groove 11 is formed so as to penetrate the holding layer 19 in the depth direction and reach the abrasive layer 18. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016068218-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016221587-A |
| priorityDate | 2008-10-03^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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