http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010197568-A

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filingDate 2009-02-24^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_368f3adf309874820f1cd2166e6641b4
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publicationDate 2010-09-09^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2010197568-A
titleOfInvention Photosensitive resin composition, dry film, and pattern forming method
abstract The present invention provides a photosensitive resin composition, a dry film, and a pattern forming method using the dry film, which are used for permanent films and do not use a photosensitizer containing halongen. SOLUTION: (A) a polymer having an alicyclic epoxy group, (B) a monomer having a radical polymerizable group, (C) a radical polymerization initiator, and (D) a photosensitizer that generates sulfonic acid by light irradiation. Even if it is used for permanent film applications, it contains a photosensitive resin composition that does not corrode materials used for fine parts and the like, and therefore can be suitably used as a photosensitive resin composition for permanent film applications. . [Selection figure] None
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