http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010532915-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2329-0418 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2329-0444 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-30415 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2203-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2329-4626 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-30453 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J31-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J3-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J31-127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-3044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J63-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J31-12 |
| filingDate | 2008-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-10-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010532915-A |
| titleOfInvention | Field emission array having carbon microstructures and method of manufacturing the same |
| abstract | A method of manufacturing a field emission array having a carbon microstructure according to the present invention includes a photomask deposition step of depositing a photomask having a pattern groove on the surface of a transparent substrate, and a photomask that deposits a negative photoresist on the surface of the photomask. A resist attaching step, and an exposure step of irradiating light from the opposite side of the transparent substrate photomask attached portion and curing a part of the negative photoresist by light irradiated to the negative photoresist through the pattern groove; and A development step for removing a non-exposed portion of the negative photoresist to form a fine structure obtained by curing the negative photoresist, a thermal decomposition step for heating and carbonizing the fine structure, and a fine step. A cathode for attaching a cathode for supplying voltage to the surface of the transparent substrate on which the structure is formed. Characterized by comprising encompass and de deposition steps. According to the present invention, a carbon microstructure used as an electron-emitting device can be manufactured easily and at low cost. [Selection] Figure 18 |
| priorityDate | 2008-06-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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