http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011009610-A

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filingDate 2009-06-29^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_184b79e6c6f142cb476b43664272c0b1
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publicationDate 2011-01-13^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2011009610-A
titleOfInvention Nitride semiconductor laser device and wafer
abstract The present invention provides a nitride semiconductor laser device having a reduced capacitance and improved responsiveness. A nitride semiconductor laser device includes an active layer, an upper cladding layer that is stacked above the active layer, a low dielectric constant insulating film that is stacked above the upper cladding layer, And a pad electrode 23 laminated above the low dielectric constant insulating film 22. [Selection] Figure 1
priorityDate 2009-06-29^^<http://www.w3.org/2001/XMLSchema#date>
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isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006128558-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0161804-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10270792-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002164622-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005108917-A
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