| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a07d0b3e3169dd026ecd9113fc9cc4ad |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66765
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 |
| filingDate |
2010-12-09^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_345f6745dbb8be5a20f73a9d98ed4b0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acfa447ad053c97b01130ccb2aff4901 |
| publicationDate |
2012-02-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012033849-A |
| titleOfInvention |
Silicon device structure and sputtering target material used for forming the same |
| abstract |
A saturation mobility characteristic of a silicon device is improved. On the A silicon semiconductor film, a P-doped n + -type amorphous silicon film, a silicon device structures having the wiring and formed on the P-doped n + -type amorphous silicon film, the wiring, the P-doped It consists of a silicon oxide film formed on the surface of the n + -type amorphous silicon film and a copper alloy film. The copper alloy film has an Mn of 1 atomic% or more and 5 atomic% or less and 0.05 atomic% or more and 1.0. This is a film formed by sputtering a copper alloy containing P of atomic% or less. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013153093-A |
| priorityDate |
2010-07-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |