http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012038988-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7839ecd03a6dfc98a65e7eb036d5a8d4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-14 |
| filingDate | 2010-08-10^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44aa7d48e6c7850bcf1d472ed7793c4c |
| publicationDate | 2012-02-23^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012038988-A |
| titleOfInvention | Light source device and optical CVD device |
| abstract | A light source device for generating spontaneous emission amplification light and photo-CVD capable of high-speed film formation are provided. A light source device according to the present invention includes a gas chamber and a window. The cylindrical gas chamber 102 is filled with silane gas and discharges the silane gas inside. The window 107 is provided at one end of the gas chamber 102. The window 107 transmits spontaneous emission amplified light (ASE) generated in the longitudinal direction of the gas chamber 102 by discharge to the outside of the gas chamber 102. [Selection] Figure 1 |
| priorityDate | 2010-08-10^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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