http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012058468-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2010-09-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0578340d8eda8655050b54e7ae628333 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a20104ecee0ec4bcd8f7e4cf2aa6743 |
| publicationDate | 2012-03-22^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012058468-A |
| titleOfInvention | Resist composition and method for producing resist pattern |
| abstract | An object of the present invention is to provide a resist composition that can further improve the mask error enhancement factor (MEEF) of the pattern obtained. SOLUTION: A polymer (IA) or a polymer of polymer (IB) has an acid labile group and is insoluble or hardly soluble in an alkaline aqueous solution, and is dissolved in an alkaline aqueous solution by the action of an acid. A resist composition comprising a resin to be obtained and an acid generator, wherein the polymer (IA) comprises a structural unit derived from the monomer of formula (I), and the polymer (IB) is a monomer of formula (I) And a structural unit derived from the monomer of formula (II) or formula (III). [Wherein R 1 , R 4 and R 8 are H and the like; R 2 and R 3 are saturated hydrocarbon groups; A 1 and A 2 are — (CH 2 ) m —CO—O— * and the like; An integer of ˜6; * represents a bond to N; R 5 represents an aromatic hydrocarbon group; R 6 represents a hydrocarbon group; R 7 represents a fluorinated alkyl group; and A 3 represents a divalent saturated hydrocarbon group. ] [Selection figure] None |
| priorityDate | 2010-09-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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