| abstract |
【Task】 A method and device for electron diffraction tomography of a crystal sample, in combination with a beam scanning protocol such that the beam converges at a separate location 42, 43 of the sample 38, a plurality of samples Scanning the electron beam across discrete locations is used to obtain a series of electron diffraction patterns, template matching is used to identify crystal orientation and thickness maps, and common intensity scale factors are obtained. [Selection] Figure 14 |