| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ca9f880ad305010d24a55b1fcfba3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H6-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H6-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate |
2011-06-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5162e50c66378048cf60cbed882bd0cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eedcc2b22254b588906ce0c6a372900f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1daf87f06419a3125df3823b794a432b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c639a6850a199674a2b4c91e7622213 |
| publicationDate |
2013-01-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013008634-A |
| titleOfInvention |
Lithium target automatic regeneration device and lithium target automatic regeneration method |
| abstract |
Lithium target automatic regeneration apparatus and lithium target automatic regeneration capable of automatically regenerating a consumed lithium target by moving a vapor deposition source to the lithium target and having a function of measuring a lithium film thickness of the lithium target Get the way. A lithium target automatic regeneration device capable of automatically regenerating lithium of a lithium target, the lithium target automatic regeneration device comprising a lithium vapor deposition unit for vapor deposition of lithium on the lithium target, and lithium vapor deposition. The unit 1 can move to the lithium target side to deposit lithium on the lithium target. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016091593-A |
| priorityDate |
2011-06-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |