| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9a255559e1d94f20510a17a673b1078 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02573
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-368 |
| filingDate |
2011-11-30^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15760f35bab3ed4859fc796b2986f019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b9a2178ca4b997d0cc111c9a32ecc92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37fd282f81330a96c96006f5e5f408e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fa377f8f10a81e62d50c1c0a19e3860
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bbc96c0002c383b29bb721fe93bedbf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c7447e067070c53e45d33050fc25029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7218f75f670605963812ae943a0a78f |
| publicationDate |
2013-06-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013115328-A |
| titleOfInvention |
Metal oxide thin film forming coating liquid, metal oxide thin film, field effect transistor, and method of manufacturing field effect transistor |
| abstract |
A metal oxide thin film having a desired volume resistivity can be produced easily and in a large area, and a coating liquid for forming a metal oxide thin film with high accuracy for forming a metal oxide of a desired shape is provided. A coating solution for forming a metal oxide thin film containing an inorganic indium compound, at least one of an inorganic calcium compound and an inorganic strontium compound, and an organic solvent. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9748097-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015111628-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018098222-A |
| priorityDate |
2011-11-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |