http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013167018-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ba165d54ce666317fde4c5799ce603e |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-8593 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17D1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2013-01-23^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9faf7089e8813b636ced1a5c1186314c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_173a8b073cf720ea1977166176f8c8c3 |
| publicationDate | 2013-08-29^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013167018-A |
| titleOfInvention | Particle beam system including a source of process gas to a processing site |
| abstract | A system is provided that enables the supply of one or more different process gases to a processing location and has an improved configuration and / or allows for more precise control of the supplied process gases. To do. A system for supplying process gas to a processing location 7 of a particle beam system 1 is provided between a gas reservoir 63, a gas conduit 65, a pipe 69 positioned near the processing location, and the gas conduit and the pipe. And a controller configured to switch the system from a first operation mode in which the process gas is not supplied to the processing place to a second operation mode in which the process gas is supplied to the processing place by opening and closing the valve 67. The controller can alternately open and close the valve 67 periodically, each period including a first duration for opening the valve and a second duration for closing the valve, the first duration and the second duration being The ratio of can be changed. [Selection] Figure 1 |
| priorityDate | 2012-01-23^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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