| abstract |
An actinic ray-sensitive or radiation-sensitive resin composition excellent in sensitivity, resolution, roughness performance and stability over time, and generating little outgas, a pattern forming method and a resist film using the composition, and these A method of manufacturing an electronic device using the above and an electronic device are provided. An actinic ray-sensitive or radiation-sensitive resin composition containing a compound capable of generating an acid upon irradiation with an actinic ray or radiation represented by the following general formula (Z1). [Selection figure] None |