http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013505199-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-039 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-04 |
| filingDate | 2010-11-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-02-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013505199-A |
| titleOfInvention | Monosilane purification method |
| abstract | A method for purifying monosilane is provided. (1) A step of removing impurities from a raw material containing monosilane and ethylene by using a fractional distillation step; and (2) a raw material purified in the step (1) is passed through activated carbon so that ethylene and the residue The present invention provides a method for purifying monosilane, comprising a step of removing impurities. According to the present invention, by selectively adsorbing and removing ethylene that is difficult to be separated by fractional distillation using activated carbon, it is possible to provide a simple and efficient high-purity monosilane without the generation of additional by-products. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018087330-A |
| priorityDate | 2009-11-16^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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