| abstract |
In a physical quantity detection device, a physical quantity can be detected under a higher pressure. In a physical quantity detection device 1 provided with a sensitive layer 12 provided on a bearing 22 for detecting a physical quantity, an oxide film 13 and a silicon nitride film 14 are provided on the sensitive layer 12 in order from the sensitive layer 12 side. Since the silicon nitride film 14 is harder than the oxide film 13, the silicon nitride film 14 is less likely to be damaged by being disposed on the side in contact with an external member. When the oxide film 13 is disposed between the silicon nitride film 14 and the sensitive layer 12, the oxide film 13 has a lower film stress than the silicon nitride film 14, so that the force transmitted to the sensitive layer 12 can be reduced. [Selection] Figure 3 |