http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015169841-A

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filingDate 2014-03-07^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d773c26933f47f09f8fae9fcf14edf1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57d69c998ba644a25a483999a8d015ba
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publicationDate 2015-09-28^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2015169841-A
titleOfInvention Actinic ray-sensitive or radiation-sensitive resin composition, pattern formation method, electronic device manufacturing method, and electronic device
abstract An actinic ray-sensitive or radiation-sensitive resin composition having a large focus tolerance and excellent developability, a pattern forming method using the composition, a method for manufacturing an electronic device, and an electronic device are provided. To do. A resin (P) containing a repeating unit (i) having a group represented by the following general formula (1), and a compound capable of generating an acid upon irradiation with an actinic ray or radiation represented by a specific formula , Containing actinic ray-sensitive or radiation-sensitive resin composition. [Selection figure] None
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