| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d4914041481b14c69ec0c4b48e9e372 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-82039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-09701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0097
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01078
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01077 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-702
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0097
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-035 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-364
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-351 |
| filingDate |
2015-12-24^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64ac40a0b90d39f659d2292622b225da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2ab618f0331786cbbee872e5fa9be7d |
| publicationDate |
2016-05-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2016074040-A |
| titleOfInvention |
Method and apparatus for laser processing |
| abstract |
An object of the present invention is to improve throughput when processing a workpiece using one or a plurality of laser beams. A method and apparatus for processing a workpiece using a laser beam includes first and second stages (74, 76) for holding workpieces (78, 80) and first and second laser beam paths. . The first workpiece is loaded onto the first stage that is aligned with the first laser beam path and processing is started. A second workpiece is prepared for the second laser beam path while the first workpiece is aligned with respect to the first laser beam path. Processing of the second workpiece begins as soon as the laser beam is available for processing. [Selection] Figure 5 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I746853-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108941885-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108941885-B |
| priorityDate |
2006-05-02^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |