http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016078331-A

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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N31-22
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D11-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-02
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filingDate 2014-10-17^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c235a81a688029f9e16aec4c88822fdf
publicationDate 2016-05-16^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2016078331-A
titleOfInvention Plasma processing detection indicator
abstract It is possible to avoid (or prevent) fine fiber pieces and colored pigments from being blown out from a substrate during plasma processing, and to influence the chromaticity of the measurement location during color measurement after plasma processing. Provided is a plasma processing detection indicator that is not subject to exposure. A plasma processing detection indicator in which at least a discoloration layer that changes color in a plasma processing atmosphere is laminated on a part or all of the surface of a substrate, (1) the substrate is made of a transparent synthetic resin group (2) The indicator which has a colored layer on the back surface of the said base material. [Selection figure] None
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017185150-A
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type http://data.epo.org/linked-data/def/patent/Publication

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