| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04N25-71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-95676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8887 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04N25-7013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04N7-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04N5-374
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04N5-372
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 |
| filingDate |
2017-04-13^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95a25804c1a4c4be3c0979b4659c2610
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d0a276fbd7d65f6f258d07dd13f6362 |
| publicationDate |
2017-08-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2017142260-A |
| titleOfInvention |
Inspection system and method |
| abstract |
An inspection system based on TDI using a smaller TDI device while reducing difficulties in driving, processing, and illumination. An inspection system for inspecting a wafer / mask / reticle surface may include a modular array. The modular array may include a plurality of time delay integration (TDI) sensor modules 410. Multiple TDI sensor modules may be arranged to capture the same inspection area or different inspection areas. The plurality of TDI sensor modules may be the same or may be provided for different integration stages. The module interval can be set so as to correspond to the processing range covering 100% of the inspection area in one pass, or two or more passes are required to cover the entire processing range. It can also be set so as to correspond to a partial processing range. [Selection] Figure 4 |
| priorityDate |
2009-01-23^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |