| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb803942eb5124eaed79db3d775fad47 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06727
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0735
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06772 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07342
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-312 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2016-04-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bec3d69189eae9bb6423be8d3664970
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a1fbb8d51763b97792b5751e1d89e1b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e4bda873faacfd3439d9f5d06a7ce8e |
| publicationDate |
2017-10-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2017187456-A |
| titleOfInvention |
Probe card |
| abstract |
Provided is a probe card that simplifies adjustment of height variation of a probe tip and adjustment of parallelism with an object to be inspected. A probe card includes a wiring substrate having wirings on the inside, a surface, and the like, a plurality of probes, and a dielectric film. The dielectric film 6 is located farther from the wiring board 2 than the needle tip portion 13 of the probe 3, and one surface 21 faces the main surface 8 which is a probe installation surface of the wiring substrate 2 and Arranged at a distance from the main surface 8 of the wiring board 2 so as to face each other. The probe card 1 constitutes a state in which the probe tip 13 faces the electrode of the object to be inspected with the dielectric film 6 sandwiched between them when inspecting the object to be inspected. The inspection signal supplied from the inspection device to the probe 3 is an AC signal, and the probe card 1 capacitively couples the needle tip 13 and the electrode of the object to be inspected to transmit the inspection signal. [Selection] Figure 1 |
| priorityDate |
2016-04-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |