http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017208596-A

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filingDate 2016-05-16^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d417effbe13ea7969995d3102dd0b0c
publicationDate 2017-11-24^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2017208596-A
titleOfInvention Ultrasonic transducer device, ultrasonic probe and ultrasonic measuring device
abstract An ultrasonic measurement apparatus that does not require the position of a light detection unit with respect to a vibration film to be installed with high positional accuracy in a plan view of a substrate is provided. An ultrasonic transducer device (1) includes a substrate (2) having an opening (3), a vibration film (5) installed on the substrate (2), a piezoelectric element (9) installed on the vibration film (5) and vibrating the vibration film (5), And a light detection unit 14 that detects the vibration of the vibration film 5 using the reflected light 15b. The light detection unit 14 is located on the opposite side of the substrate 2 with respect to the vibration film 5. [Selection] Figure 1
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