http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018010278-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2017-05-31^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f245ddfecb97f7771c44d356e4580e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 |
| publicationDate | 2018-01-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018010278-A |
| titleOfInvention | Resist composition and method for producing resist pattern |
| abstract | PROBLEM TO BE SOLVED: To provide a resist composition capable of producing a resist pattern with good CD uniformity (CDU). A resist composition containing a resin containing a structural unit having an acid unstable group, an acid generator, and a compound represented by the formula (I). [In formula (I), R3 represents a linear alkyl group having 3 to 12 carbon atoms. R1, R2, R4, and R5 each independently represent a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or the like. R6 is a hydrocarbon group having 1 to 12 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkylcarbonyl group having 2 to 7 carbon atoms, an alkylcarbonyloxy group having 2 to 7 carbon atoms, and an alkoxy group having 2 to 7 carbon atoms. Represents a carbonyl group, a nitro group, a cyano group, a hydroxy group or a halogen atom. ] [Selection diagram] None |
| priorityDate | 2016-06-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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