| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 |
| filingDate |
2016-09-30^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a3ab34b52f7864bdd99c66e0a6ba4c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2e575dee18e4218935f1a3da622c374 |
| publicationDate |
2018-04-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2018059130-A |
| titleOfInvention |
Method for producing vapor deposition mask, and method for producing metal plate used for producing vapor deposition mask |
| abstract |
An evaporation mask with small variations in the shape of through-holes is manufactured. A method for manufacturing a vapor deposition mask is made of an iron alloy containing nickel, and includes a first surface located on a substrate side to which a vapor deposition material that has passed through a through hole adheres, and a second surface located on the opposite side of the first surface. A preparation step of preparing a metal plate including a surface, a surface layer removal step of removing at least a surface layer on the first surface side of the metal plate, and a processing step of etching the metal plate to form a through hole in the metal plate And comprising. [Selection] Figure 16 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6788852-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115323321-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020158810-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7253143-B2 |
| priorityDate |
2016-09-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |